- All sections
- C - Chemistry; metallurgy
- C23C - Coating metallic material; coating material with metallic material; surface treatment of metallic material by diffusion into the surface, by chemical conversion or substitution; coating by vacuum evaporation, by sputtering, by ion implantation or by chemical vapour deposition, in general
- C23C 16/16 - Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (CVD) processes characterised by the deposition of metallic material from metal carbonyl compounds
Patent holdings for IPC class C23C 16/16
Total number of patents in this class: 191
10-year publication summary
|
16
|
14
|
9
|
15
|
11
|
9
|
13
|
11
|
19
|
4
|
| 2015 | 2016 | 2017 | 2018 | 2019 | 2020 | 2021 | 2022 | 2023 | 2024 |
Principal owners for this class
| Owner |
All patents
|
This class
|
|---|---|---|
| Tokyo Electron Limited | 11599 |
58 |
| Tanaka Kikinzoku Kogyo K.K. | 589 |
13 |
| Entegris, Inc. | 1736 |
12 |
| Applied Materials, Inc. | 16587 |
11 |
| Tokyo Electron America, Inc. | 97 |
8 |
| International Business Machines Corporation | 60644 |
7 |
| Merck Patent GmbH | 5909 |
5 |
| Lam Research Corporation | 4775 |
5 |
| Adeka Corporation | 1333 |
5 |
| Gelest, Inc. | 104 |
4 |
| L'Air Liquide, Societe Anonyme pour l'Etude et l'Exploitation des Procedes Georges Claude | 3515 |
4 |
| Sigma-Aldrich Co. | 55 |
3 |
| Versum Materials US, LLC | 591 |
3 |
| Public Joint Stock Company "severstal" | 14 |
3 |
| Applied Materials Israel, Ltd. | 549 |
2 |
| Taiwan Semiconductor Manufacturing Company, Ltd. | 36809 |
2 |
| Carl Zeiss SMT GmbH | 2646 |
2 |
| American Air Liquide, Inc. | 223 |
2 |
| ASM IP Holding B.V. | 1715 |
2 |
| Gelest Technologies, Inc. | 16 |
2 |
| Other owners | 38 |